High Power Impulse Magnetron Sputtering

Written By Daniel Lundin
High Power Impulse Magnetron Sputtering
  • Publsiher : Unknown
  • Release : 13 September 2019
  • ISBN : 0128124547
  • Pages : 398 pages
  • Rating : 4/5 from 21 reviews
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Read or download book entitled High Power Impulse Magnetron Sputtering written by Daniel Lundin which was release on 13 September 2019, this book published by Unknown. Available in PDF, EPUB and Kindle Format. Book excerpt: High Power Impulse Magnetron Sputtering: Fundamentals, Technologies, Challenges and Applications is an in-depth introduction to HiPIMS that emphasizes how this novel sputtering technique differs from conventional magnetron processes in terms of both discharge physics and the resulting thin film characteristics. Ionization of sputtered atoms is discussed in detail for various target materials. In addition, the role of self-sputtering, secondary electron emission and the importance of controlling the process gas dynamics, both inert and reactive gases, are examined in detail with an aim to generate stable HiPIMS processes. Lastly, the book also looks at how to characterize the HiPIMS discharge, including essential diagnostic equipment. Experimental results and simulations based on industrially relevant material systems are used to illustrate mechanisms controlling nucleation kinetics, column formation and microstructure evolution. Includes a comprehensive description of the HiPIMS process from fundamental physics to applications Provides a distinctive link between the process plasma and thin film communities Discusses the industrialization of HiPIMS and its real world applications

High Power Impulse Magnetron Sputtering

High Power Impulse Magnetron Sputtering
  • Author : Daniel Lundin,Jon Tomas Gudmundsson,Tiberiu Minea
  • Publisher : Unknown
  • Release Date : 2019-09-13
  • Total pages : 398
  • ISBN : 0128124547
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Summary : High Power Impulse Magnetron Sputtering: Fundamentals, Technologies, Challenges and Applications is an in-depth introduction to HiPIMS that emphasizes how this novel sputtering technique differs from conventional magnetron processes in terms of both discharge physics and the resulting thin film characteristics. Ionization of sputtered atoms is discussed in detail for various ...

High Power Impulse Magnetron Sputtering and Related Discharges

High Power Impulse Magnetron Sputtering and Related Discharges
  • Author : Anonim
  • Publisher : Unknown
  • Release Date : 2009
  • Total pages : 11
  • ISBN : 0128124547
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Summary : High power impulse magnetron sputtering (HIPIMS) and related self-sputtering techniques are reviewed from a viewpoint of plasma-based ion implantation and deposition (PBII & D). HIPIMS combines the classical, scalable sputtering technology with pulsed power, which is an elegant way of ionizing the sputtered atoms. Related approaches, such as sustained self-sputtering, are ...

Discharge Physics of High Power Impulse Magnetron Sputtering

Discharge Physics of High Power Impulse Magnetron Sputtering
  • Author : Anonim
  • Publisher : Unknown
  • Release Date : 2010
  • Total pages : 212
  • ISBN : 0128124547
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Summary : High power impulse magnetron sputtering (HIPIMS) is pulsed sputtering where the peak power exceeds the time-averaged power by typically two orders of magnitude. The peak power density, averaged over the target area, can reach or exceed 107 W/m2, leading to plasma conditions that make ionization of the sputtered atoms very ...

Erratum

Erratum
  • Author : Anonim
  • Publisher : Unknown
  • Release Date : 2007
  • Total pages : 212
  • ISBN : 0128124547
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Summary : Download or read online Erratum written by , published by which was released on 2007. Get Erratum Books now! Available in PDF, ePub and Kindle....

Method and Apparatus for Improved High Power Impulse Magnetron Sputtering

Method and Apparatus for Improved High Power Impulse Magnetron Sputtering
  • Author : Anonim
  • Publisher : Unknown
  • Release Date : 2013
  • Total pages : 212
  • ISBN : 0128124547
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Summary : A high power impulse magnetron sputtering apparatus and method using a vacuum chamber with a magnetron target and a substrate positioned in the vacuum chamber. A field coil being positioned between the magnetron target and substrate, and a pulsed power supply and/or a coil bias power supply connected to ...

Plasma Flares in High Power Impulse Magnetron Sputtering

Plasma Flares in High Power Impulse Magnetron Sputtering
  • Author : Anonim
  • Publisher : Unknown
  • Release Date : 2012
  • Total pages : 212
  • ISBN : 0128124547
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Summary : Download or read online Plasma Flares in High Power Impulse Magnetron Sputtering written by , published by which was released on 2012. Get Plasma Flares in High Power Impulse Magnetron Sputtering Books now! Available in PDF, ePub and Kindle....

6th International Conference on High Power Impulse Magnetron Sputtering HIPIMS 2015

6th International Conference on High Power Impulse Magnetron Sputtering  HIPIMS 2015
  • Author : Ralf Bandorf
  • Publisher : Unknown
  • Release Date : 2016
  • Total pages : 212
  • ISBN : 0128124547
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Summary : Download or read online 6th International Conference on High Power Impulse Magnetron Sputtering HIPIMS 2015 written by Ralf Bandorf, published by which was released on 2016. Get 6th International Conference on High Power Impulse Magnetron Sputtering HIPIMS 2015 Books now! Available in PDF, ePub and Kindle....

Plasma Diagnosis of Reactive High Power Impulse Magnetron Sputtering HiPIMS Discharges

Plasma Diagnosis of Reactive High Power Impulse Magnetron Sputtering  HiPIMS  Discharges
  • Author : Michael Bowes
  • Publisher : Unknown
  • Release Date : 2014
  • Total pages : 212
  • ISBN : 0128124547
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Summary : Download or read online Plasma Diagnosis of Reactive High Power Impulse Magnetron Sputtering HiPIMS Discharges written by Michael Bowes, published by which was released on 2014. Get Plasma Diagnosis of Reactive High Power Impulse Magnetron Sputtering HiPIMS Discharges Books now! Available in PDF, ePub and Kindle....

Fundamentals of High Power Impulse Magnetron Sputtering

Fundamentals of High Power Impulse Magnetron Sputtering
  • Author : Johan Böhlmark,Linköpings universitet. Institutionen för fysik, kemi och biologi
  • Publisher : Unknown
  • Release Date : 2006
  • Total pages : 64
  • ISBN : 0128124547
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Summary : Download or read online Fundamentals of High Power Impulse Magnetron Sputtering written by Johan Böhlmark,Linköpings universitet. Institutionen för fysik, kemi och biologi, published by which was released on 2006. Get Fundamentals of High Power Impulse Magnetron Sputtering Books now! Available in PDF, ePub and Kindle....

High Power Impulse Magnetron Sputtering HIPIMS FundamentalPlasma Studies and Materials Synthesis

High Power Impulse Magnetron Sputtering  HIPIMS    FundamentalPlasma Studies and Materials Synthesis
  • Author : Ante Hecimovic
  • Publisher : Unknown
  • Release Date : 2009
  • Total pages : 212
  • ISBN : 0128124547
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Summary : Download or read online High Power Impulse Magnetron Sputtering HIPIMS FundamentalPlasma Studies and Materials Synthesis written by Ante Hecimovic, published by which was released on 2009. Get High Power Impulse Magnetron Sputtering HIPIMS FundamentalPlasma Studies and Materials Synthesis Books now! Available in PDF, ePub and Kindle....

Plasma anti assistance And self assistance to High Power Impulse Magnetron Sputtering

Plasma anti assistance  And self assistance  to High Power Impulse Magnetron Sputtering
  • Author : Anonim
  • Publisher : Unknown
  • Release Date : 2009
  • Total pages : 19
  • ISBN : 0128124547
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Summary : A plasma assistance system was investigated with the goal to operate high power impulse magnetron sputtering (HiPIMS) at lower pressure than usual, thereby to enhance the utilization of the ballistic atoms and ions with high kinetic energy in the film growth process. Gas plasma flow from a constricted plasma source ...

Deposition Rates of High Power Impulse Magnetron Sputtering

Deposition Rates of High Power Impulse Magnetron Sputtering
  • Author : Anonim
  • Publisher : Unknown
  • Release Date : 2009
  • Total pages : 18
  • ISBN : 0128124547
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Summary : Deposition by high power impulse magnetron sputtering (HIPIMS) is considered by some as the new paradigm of advanced sputtering technology, yet this is met with skepticism by others for the reported lower deposition rates, if compared to rates of more conventional sputtering of equal average power. In this contribution, the ...

DEPOSITION OF NIOBIUM AND OTHER SUPERCONDUCTING MATERIALS WITH HIGH POWER IMPULSE MAGNETRON SPUTTERING

DEPOSITION OF NIOBIUM AND OTHER SUPERCONDUCTING MATERIALS WITH HIGH POWER IMPULSE MAGNETRON SPUTTERING
  • Author : Anonim
  • Publisher : Unknown
  • Release Date : 2011
  • Total pages : 212
  • ISBN : 0128124547
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Summary : Niobium coatings on copper cavities have been considered as a cost-efficient replacement of bulk niobium RF cavities, however, coatings made by magnetron sputtering have not quite lived up to high expectations due to Q-slope and other issues. High power impulse magnetron sputtering (HIPIMS) is a promising emerging coatings technology which ...

Modeling High Power Impulse Magnetron Sputtering Discharges

Modeling High Power Impulse Magnetron Sputtering Discharges
  • Author : Anonim
  • Publisher : Unknown
  • Release Date : 2012
  • Total pages : 52
  • ISBN : 0128124547
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Summary : Download or read online Modeling High Power Impulse Magnetron Sputtering Discharges written by , published by which was released on 2012. Get Modeling High Power Impulse Magnetron Sputtering Discharges Books now! Available in PDF, ePub and Kindle....

Invasive and Non invasive Diagnostics of High Power Impulse Magnetron Sputtering HiPIMS Discharges

Invasive and Non invasive Diagnostics of High Power Impulse Magnetron Sputtering  HiPIMS  Discharges
  • Author : Bernd Liebig
  • Publisher : Unknown
  • Release Date : 2013
  • Total pages : 212
  • ISBN : 0128124547
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Summary : Download or read online Invasive and Non invasive Diagnostics of High Power Impulse Magnetron Sputtering HiPIMS Discharges written by Bernd Liebig, published by which was released on 2013. Get Invasive and Non invasive Diagnostics of High Power Impulse Magnetron Sputtering HiPIMS Discharges Books now! Available in PDF, ePub and Kindle....