Handbook of Sputter Deposition Technology

Written By Kiyotaka Wasa
Handbook of Sputter Deposition Technology
  • Publsiher : William Andrew
  • Release : 02 August 2021
  • ISBN : 1437734839
  • Pages : 644 pages
  • Rating : 4/5 from 21 reviews
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Read or download book entitled Handbook of Sputter Deposition Technology written by Kiyotaka Wasa which was release on 02 August 2021, this book published by William Andrew. Available in PDF, EPUB and Kindle Format. Book excerpt: Sputtering is a Physical Vapor Deposition vacuum process used to deposit very thin films onto a substrate for a wide variety of commercial and scientific purposes. Sputtering occurs when an ionized gas molecule is used to displace atoms of a specific material. These atoms then bond at the atomic level to a substrate and create a thin film. Several types of sputtering processes exist, including: ion beam, diode, and magnetron sputtering. Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallic coatings. High temperature, diamond films and ferroelectric materials are other applications. Sputtering applications are important across a wide range of industries, including the automotive, medical, semiconductors, space, plastics, and military sectors. A strong applications focus, covering current and emerging technologies, including nano-materials and MEMS (microelectrolmechanical systems) for energy, environments, communications, and/or bio-medical field. New chapters on computer simulation of sputtering and MEMS completes the update and insures that the new edition includes the most current and forward-looking coverage available. All applications discussed are supported by theoretical discussions, offering readers both the "how" and the "why" of each technique. 40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere.

Handbook of Sputter Deposition Technology

Handbook of Sputter Deposition Technology
  • Author : Kiyotaka Wasa,Isaku Kanno,Hidetoshi Kotera
  • Publisher : William Andrew
  • Release Date : 2012
  • Total pages : 644
  • ISBN : 1437734839
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Summary : Sputtering is a Physical Vapor Deposition vacuum process used to deposit very thin films onto a substrate for a wide variety of commercial and scientific purposes. Sputtering occurs when an ionized gas molecule is used to displace atoms of a specific material. These atoms then bond at the atomic level ...

Handbook of Sputter Deposition Technology

Handbook of Sputter Deposition Technology
  • Author : Shigeru Hayakawa
  • Publisher : William Andrew Publishing
  • Release Date : 1992-01-01
  • Total pages : 304
  • ISBN : 1437734839
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Summary : A concise, comprehensive overview of sputter deposition technologyùa key technology for materials research in the next decade. Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ...

Handbook of Deposition Technologies for Films and Coatings

Handbook of Deposition Technologies for Films and Coatings
  • Author : Peter M. Martin
  • Publisher : William Andrew
  • Release Date : 2009-12-01
  • Total pages : 936
  • ISBN : 1437734839
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Summary : This 3e, edited by Peter M. Martin, PNNL 2005 Inventor of the Year, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. This long-awaited revision includes updated and new chapters on atomic layer deposition, cathodic arc deposition, sculpted thin films, polymer thin films and emerging technologies. ...

Handbook of Silicon Wafer Cleaning Technology 2nd Edition

Handbook of Silicon Wafer Cleaning Technology  2nd Edition
  • Author : Karen Reinhardt,Werner Kern
  • Publisher : William Andrew
  • Release Date : 2008-12-10
  • Total pages : 660
  • ISBN : 1437734839
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Summary : The second Edition of the Handbook of Silicon Wafer Cleaning Technology is intended to provide knowledge of wet, plasma, and other surface conditioning techniques used to manufacture integrated circuits. The integration of the clean processes into the device manufacturing flow will be presented with respect to other manufacturing steps such ...

Handbook of Deposition Technologies for Films and Coatings

Handbook of Deposition Technologies for Films and Coatings
  • Author : Rointan Framroze Bunshah
  • Publisher : William Andrew
  • Release Date : 1994
  • Total pages : 861
  • ISBN : 1437734839
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Summary : This second edition, edited by the world-renowned Dr. Rointain Bunshah, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. Considerably more material was added in Plasma Assisted Vapor Deposition processes, as well as Metallurgical Coating Applications....

Handbook of Ion Beam Processing Technology

Handbook of Ion Beam Processing Technology
  • Author : Jerome J. Cuomo,Stephen M. Rossnagel,Harold R. Kaufman,Stephen M. Haber
  • Publisher : William Andrew
  • Release Date : 1989
  • Total pages : 438
  • ISBN : 1437734839
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Summary : Deals with ion beam processing for basic sputter etching of samples, sputter deposition of thin films, the synthesis of material in thin film form, and the modification of the properties of thin films....

Handbook of Thin Film Process Technology

Handbook of Thin Film Process Technology
  • Author : David A Glocker
  • Publisher : CRC Press
  • Release Date : 2018-01-18
  • Total pages : 90
  • ISBN : 1437734839
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Summary : The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. This handbook is regularly updated with new material, and this volume is a special issue on reactive sputtering which will be of interest to a wide range of industrial and academic ...

Handbook of Sputter Deposition Technology

Handbook of Sputter Deposition Technology
  • Author : Kiyotaka Wasa
  • Publisher : William Andrew
  • Release Date : 2012-12-31
  • Total pages : 660
  • ISBN : 1437734839
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Summary : This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems. Organized into three parts for ease ...

Handbook of Thin Film Deposition

Handbook of Thin Film Deposition
  • Author : Krishna Seshan
  • Publisher : William Andrew
  • Release Date : 2012
  • Total pages : 392
  • ISBN : 1437734839
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Summary : Resumen: The 2nd edition contains new chapters on contamination and contamination control that describe the basics and the issues. Another new chapter on meteorology explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of sub-micron dimensions. The book also covers PVD, laser and e-beam assisted deposition, ...

Handbook of Plasma Processing Technology

Handbook of Plasma Processing Technology
  • Author : Stephen M. Rossnagel,J. J. Cuomo,William Dickson Westwood
  • Publisher : William Andrew
  • Release Date : 1990
  • Total pages : 523
  • ISBN : 1437734839
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Summary : This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors....

Handbook of Thin Film Technology

Handbook of Thin Film Technology
  • Author : Hartmut Frey,Hamid R. Khan
  • Publisher : Springer Science & Business Media
  • Release Date : 2015-05-06
  • Total pages : 380
  • ISBN : 1437734839
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Summary : “Handbook of Thin Film Technology” covers all aspects of coatings preparation, characterization and applications. Different deposition techniques based on vacuum and plasma processes are presented. Methods of surface and thin film analysis including coating thickness, structural, optical, electrical, mechanical and magnetic properties of films are detailed described. The several applications ...

Handbook of Thin Film Deposition

Handbook of Thin Film Deposition
  • Author : Krishna Seshan,Dominic Schepis
  • Publisher : William Andrew
  • Release Date : 2018-02-23
  • Total pages : 470
  • ISBN : 1437734839
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Summary : Handbook of Thin Film Deposition, Fourth Edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, materials for memory applications and methods for thin film optical ...

Handbook of Physical Vapor Deposition PVD Processing

Handbook of Physical Vapor Deposition  PVD  Processing
  • Author : D. M. Mattox
  • Publisher : Cambridge University Press
  • Release Date : 2014-09-19
  • Total pages : 944
  • ISBN : 1437734839
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Summary : This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films ...

Handbook of Optical Properties

Handbook of Optical Properties
  • Author : Rolf E. Hummel,Karl H. Guenther
  • Publisher : CRC Press
  • Release Date : 1995-02-24
  • Total pages : 384
  • ISBN : 1437734839
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Summary : Thin Films for Optical Coating emphasizes the applications of thin films, deposition of thin films, and thin film characterization. Unlike monographs on this subject, this book presents the views of many expert authors. Individual chapters span a wide arc of topics within this field of study. The book offers an ...

Handbook of Thin Film Process Technology

Handbook of Thin Film Process Technology
  • Author : D Glocker
  • Publisher : CRC Press
  • Release Date : 2018-01-18
  • Total pages : 135
  • ISBN : 1437734839
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Summary : The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. This handbook is regularly updated with new material, and this volume presents additional recipe-type information (i.e. important deposition system details and process parameters) for optical materials....