Handbook of Sputter Deposition Technology

Written By Kiyotaka Wasa
Handbook of Sputter Deposition Technology
  • Publsiher : William Andrew
  • Release : 24 January 2022
  • ISBN : 1437734839
  • Pages : 644 pages
  • Rating : 4/5 from 21 reviews
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Read or download book entitled Handbook of Sputter Deposition Technology written by Kiyotaka Wasa which was release on 24 January 2022, this book published by William Andrew. Available in PDF, EPUB and Kindle Format. Book excerpt: Sputtering is a Physical Vapor Deposition vacuum process used to deposit very thin films onto a substrate for a wide variety of commercial and scientific purposes. Sputtering occurs when an ionized gas molecule is used to displace atoms of a specific material. These atoms then bond at the atomic level to a substrate and create a thin film. Several types of sputtering processes exist, including: ion beam, diode, and magnetron sputtering. Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallic coatings. High temperature, diamond films and ferroelectric materials are other applications. Sputtering applications are important across a wide range of industries, including the automotive, medical, semiconductors, space, plastics, and military sectors. A strong applications focus, covering current and emerging technologies, including nano-materials and MEMS (microelectrolmechanical systems) for energy, environments, communications, and/or bio-medical field. New chapters on computer simulation of sputtering and MEMS completes the update and insures that the new edition includes the most current and forward-looking coverage available. All applications discussed are supported by theoretical discussions, offering readers both the "how" and the "why" of each technique. 40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere.

Handbook of Sputter Deposition Technology

Handbook of Sputter Deposition Technology
  • Author : Kiyotaka Wasa,Isaku Kanno,Hidetoshi Kotera
  • Publisher : William Andrew
  • Release Date : 2012
  • Total pages : 644
  • ISBN : 1437734839
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Summary : Sputtering is a Physical Vapor Deposition vacuum process used to deposit very thin films onto a substrate for a wide variety of commercial and scientific purposes. Sputtering occurs when an ionized gas molecule is used to displace atoms of a specific material. These atoms then bond at the atomic level ...

Handbook of Sputter Deposition Technology

Handbook of Sputter Deposition Technology
  • Author : Shigeru Hayakawa
  • Publisher : William Andrew Publishing
  • Release Date : 1992-01-01
  • Total pages : 304
  • ISBN : 1437734839
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Summary : A concise, comprehensive overview of sputter deposition technology├╣a key technology for materials research in the next decade. Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ...

Handbook of Sputter Deposition Technology

Handbook of Sputter Deposition Technology
  • Author : Kiyotaka Wasa
  • Publisher : William Andrew
  • Release Date : 2012-12-31
  • Total pages : 660
  • ISBN : 1437734839
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Summary : This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems. Organized into three parts for ease ...

Handbook of Thin Film Process Technology

Handbook of Thin Film Process Technology
  • Author : David A Glocker
  • Publisher : CRC Press
  • Release Date : 2018-01-18
  • Total pages : 90
  • ISBN : 1437734839
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Summary : The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. This handbook is regularly updated with new material, and this volume is a special issue on reactive sputtering which will be of interest to a wide range of industrial and academic ...

Handbook of Deposition Technologies for Films and Coatings

Handbook of Deposition Technologies for Films and Coatings
  • Author : Peter M. Martin
  • Publisher : William Andrew
  • Release Date : 2009-12-01
  • Total pages : 936
  • ISBN : 1437734839
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Summary : This 3e, edited by Peter M. Martin, PNNL 2005 Inventor of the Year, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. This long-awaited revision includes updated and new chapters on atomic layer deposition, cathodic arc deposition, sculpted thin films, polymer thin films and emerging technologies. ...

Handbook of Thin Film Deposition Processes and Techniques

Handbook of Thin Film Deposition Processes and Techniques
  • Author : Krishna Seshan
  • Publisher : William Andrew
  • Release Date : 2001-02-01
  • Total pages : 430
  • ISBN : 1437734839
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Summary : New second edition of the popular book on deposition (first edition by Klaus Schruegraf) for engineers, technicians, and plant personnel in the semiconductor and related industries. This book traces the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. ...

Handbook of Chemical Vapor Deposition

Handbook of Chemical Vapor Deposition
  • Author : Hugh O. Pierson
  • Publisher : William Andrew
  • Release Date : 1999-09-01
  • Total pages : 506
  • ISBN : 1437734839
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Summary : Turn to this new second edition for an understanding of the latest advances in the chemical vapor deposition (CVD) process. CVD technology has recently grown at a rapid rate, and the number and scope of its applications and their impact on the market have increased considerably. The market is now ...

The Foundations of Vacuum Coating Technology

The Foundations of Vacuum Coating Technology
  • Author : Donald M. Mattox
  • Publisher : William Andrew
  • Release Date : 2018-08-21
  • Total pages : 378
  • ISBN : 1437734839
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Summary : The Foundations of Vacuum Coating Technology, Second Edition, is a revised and expanded version of the first edition, which was published in 2003. The book reviews the histories of the various vacuum coating technologies and expands on the history of the enabling technologies of vacuum technology, plasma technology, power supplies, and ...

Handbook of Physical Vapor Deposition PVD Processing

Handbook of Physical Vapor Deposition  PVD  Processing
  • Author : D. M. Mattox
  • Publisher : Cambridge University Press
  • Release Date : 2014-09-19
  • Total pages : 944
  • ISBN : 1437734839
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Summary : This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films ...

Thin film materials technology

Thin film materials technology
  • Author : Kiyotaka Wasa,Makoto Kitabatake,Hideaki Adachi
  • Publisher : Springer Science & Business Media
  • Release Date : 2004-09-24
  • Total pages : 518
  • ISBN : 1437734839
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Summary : This title contains rich historical coverage of the basics and new experimental and technological information about ceramic thin film and large-area functional coating. Included are principles and examples of making thin-film materials and devices....

Encyclopedia of Optical and Photonic Engineering Print Five Volume Set

Encyclopedia of Optical and Photonic Engineering  Print    Five Volume Set
  • Author : Craig Hoffman,Ronald Driggers
  • Publisher : CRC Press
  • Release Date : 2015-09-22
  • Total pages : 4088
  • ISBN : 1437734839
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Summary : The first edition of the Encyclopedia of Optical and Photonic Engineering provided a valuable reference concerning devices or systems that generate, transmit, measure, or detect light, and to a lesser degree, the basic interaction of light and matter. This Second Edition not only reflects the changes in optical and photonic ...

Handbook of Hydrothermal Technology

Handbook of Hydrothermal Technology
  • Author : K. Byrappa,Masahiro Yoshimura
  • Publisher : Cambridge University Press
  • Release Date : 2008-12-10
  • Total pages : 893
  • ISBN : 1437734839
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Summary : Quartz, zeolites, gemstones, perovskite type oxides, ferrite, carbon allotropes, complex coordinated compounds and many more├╣all products now being produced using hydrothermal technology. Handbook of Hydrothermal Technology brings together the latest techniques in this rapidly advancing field in one exceptionally useful, long-needed volume. The handbook provides a single source for ...

Handbook of Silicon Wafer Cleaning Technology 2nd Edition

Handbook of Silicon Wafer Cleaning Technology  2nd Edition
  • Author : Karen Reinhardt,Werner Kern
  • Publisher : William Andrew
  • Release Date : 2008-12-10
  • Total pages : 660
  • ISBN : 1437734839
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Summary : The second Edition of the Handbook of Silicon Wafer Cleaning Technology is intended to provide knowledge of wet, plasma, and other surface conditioning techniques used to manufacture integrated circuits. The integration of the clean processes into the device manufacturing flow will be presented with respect to other manufacturing steps such ...

Handbook of Industrial Refractories Technology

Handbook of Industrial Refractories Technology
  • Author : Stephen Caniglia,Gordon L. Barna
  • Publisher : William Andrew
  • Release Date : 1992-12-31
  • Total pages : 650
  • ISBN : 1437734839
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Summary : Encompasses the entire range of industrial refractory materials and forms: properties and their measurement, applications, manufacturing, installation and maintenance techniques, quality assurance, and statistical process control....

Handbook of Compound Semiconductors

Handbook of Compound Semiconductors
  • Author : Paul H. Holloway,Gary E. McGuire
  • Publisher : Elsevier
  • Release Date : 1996-12-31
  • Total pages : 926
  • ISBN : 1437734839
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Summary : This book reviews the recent advances and current technologies used to produce microelectronic and optoelectronic devices from compound semiconductors. It provides a complete overview of the technologies necessary to grow bulk single-crystal substrates, grow hetero-or homoepitaxial films, and process advanced devices such as HBT's, QW diode lasers, etc....