Handbook of Silicon Based MEMS Materials and Technologies

Written By Markku Tilli
Handbook of Silicon Based MEMS Materials and Technologies
  • Publsiher : Elsevier
  • Release : 08 December 2009
  • ISBN : 9780815519881
  • Pages : 668 pages
  • Rating : 4/5 from 21 reviews
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Read or download book entitled Handbook of Silicon Based MEMS Materials and Technologies written by Markku Tilli which was release on 08 December 2009, this book published by Elsevier. Available in PDF, EPUB and Kindle Format. Book excerpt: A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS material Material properties and measurement techniques Analytical methods used in materials characterization Modeling in MEMS Measuring MEMS Micromachining technologies in MEMS Encapsulation of MEMS components Emerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R&D and academic communities. Veikko Lindroos is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland. Markku Tilli is Senior Vice President of Research at Okmetic, Vantaa, Finland. Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland. Teruaki Motooka is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan. Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques Shows how to protect devices from the environment and decrease package size for dramatic reduction of packaging costs Discusses properties, preparation, and growth of silicon crystals and wafers Explains the many properties (mechanical, electrostatic, optical, etc), manufacturing, processing, measuring (incl. focused beam techniques), and multiscale modeling methods of MEMS structures

Handbook of Silicon Based MEMS Materials and Technologies

Handbook of Silicon Based MEMS Materials and Technologies
  • Author : Markku Tilli,Mervi Paulasto-Krockel,Veli-Matti Airaksinen,Sami Franssila,Veikko Lindroos,Ari Lehto,Teruaki Motooka
  • Publisher : Elsevier
  • Release Date : 2009-12-08
  • Total pages : 668
  • ISBN : 9780815519881
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Summary : A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS material Material properties and measurement techniques Analytical methods used in materials characterization Modeling in MEMS Measuring MEMS Micromachining technologies ...

Handbook of Silicon Based MEMS Materials and Technologies

Handbook of Silicon Based MEMS Materials and Technologies
  • Author : Markku Tilli,Mervi Paulasto-Kröckel,Matthias Petzold,Horst Theuss,Teruaki Motooka,Veikko Lindroos
  • Publisher : Elsevier
  • Release Date : 2020-04-17
  • Total pages : 1026
  • ISBN : 9780815519881
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Summary : Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, ...

MEMS Materials and Processes Handbook

MEMS Materials and Processes Handbook
  • Author : Reza Ghodssi,Pinyen Lin
  • Publisher : Springer Science & Business Media
  • Release Date : 2011-03-18
  • Total pages : 1188
  • ISBN : 9780815519881
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Summary : MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through ...

Mems Nems

Mems Nems
  • Author : Cornelius T. Leondes
  • Publisher : Springer Science & Business Media
  • Release Date : 2007-10-08
  • Total pages : 2094
  • ISBN : 9780815519881
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Summary : This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of ...

Semiconductor Manufacturing Handbook Second Edition

Semiconductor Manufacturing Handbook  Second Edition
  • Author : Hwaiyu Geng
  • Publisher : McGraw Hill Professional
  • Release Date : 2017-10-06
  • Total pages : 704
  • ISBN : 9780815519881
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Summary : Thoroughly Revised, State-of-the-Art Semiconductor Design, Manufacturing, and Operations Information Written by 70 international experts and reviewed by a seasoned technical advisory board, this fully updated resource clearly explains the cutting-edge processes used in the design and fabrication of IC chips, MEMS, sensors, and other electronic devices. Semiconductor Manufacturing Handbook, Second Edition, ...

Handbook of Wafer Bonding

Handbook of Wafer Bonding
  • Author : Peter Ramm,James Jian-Qiang Lu,Maaike M. V. Taklo
  • Publisher : John Wiley & Sons
  • Release Date : 2012-02-13
  • Total pages : 395
  • ISBN : 9780815519881
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Summary : The focus behind this book on wafer bonding is the fast paced changes in the research and development in three-dimensional (3D) integration, temporary bonding and micro-electro-mechanical systems (MEMS) with new functional layers. Written by authors and edited by a team from microsystems companies and industry-near research organizations, this handbook and ...

Handbook of Mems for Wireless and Mobile Applications

Handbook of Mems for Wireless and Mobile Applications
  • Author : Deepak Uttamchandani
  • Publisher : Elsevier
  • Release Date : 2013-08-31
  • Total pages : 640
  • ISBN : 9780815519881
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Summary : The increasing demand for mobile and wireless sensing necessitates the use of highly integrated technology featuring small size, low weight, high performance and low cost: micro-electro-mechanical systems (MEMS) can meet this need. The Handbook of MEMS for wireless and mobile applications provides a comprehensive overview of radio frequency (RF) MEMS ...

Biomolecular Electronics

Biomolecular Electronics
  • Author : Paolo Facci
  • Publisher : Elsevier Science Limited
  • Release Date : 2014-04-14
  • Total pages : 256
  • ISBN : 9780815519881
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Summary : Biomolecular Electronics - the electrical control of biological phenomena - is a scientific challenge that, once fully realized, will find a wide range of applications from electronics and computing to medicine and therapeutic techniques. This new arena of biomolecular electronics is approached using familiar concepts from many areas such as ...

Mems Nems

Mems Nems
  • Author : Cornelius T. Leondes
  • Publisher : Springer
  • Release Date : 2006-09-06
  • Total pages : 2094
  • ISBN : 9780815519881
GET BOOK

Summary : This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of ...

Mems Nems

Mems Nems
  • Author : Cornelius T. Leondes
  • Publisher : Springer
  • Release Date : 2006-09-06
  • Total pages : 2094
  • ISBN : 9780815519881
GET BOOK

Summary : This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of ...

Mems Nems

Mems Nems
  • Author : Cornelius T. Leondes
  • Publisher : Springer
  • Release Date : 2006-09-06
  • Total pages : 2094
  • ISBN : 9780815519881
GET BOOK

Summary : This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of ...

Mems Nems

Mems Nems
  • Author : Cornelius T. Leondes
  • Publisher : Springer
  • Release Date : 2006-09-06
  • Total pages : 2094
  • ISBN : 9780815519881
GET BOOK

Summary : This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of ...

Mems Nems

Mems Nems
  • Author : Cornelius T. Leondes
  • Publisher : Springer
  • Release Date : 2006-09-06
  • Total pages : 2094
  • ISBN : 9780815519881
GET BOOK

Summary : This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of ...

International Journal of Manufacturing Technology and Management

International Journal of Manufacturing Technology and Management
  • Author : Anonim
  • Publisher : Unknown
  • Release Date : 2006
  • Total pages : 212
  • ISBN : 9780815519881
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Summary : Download or read online International Journal of Manufacturing Technology and Management written by , published by which was released on 2006. Get International Journal of Manufacturing Technology and Management Books now! Available in PDF, ePub and Kindle....

Mems Nems

Mems Nems
  • Author : Cornelius T. Leondes
  • Publisher : Springer
  • Release Date : 2006-09-06
  • Total pages : 2094
  • ISBN : 9780815519881
GET BOOK

Summary : This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of ...