Handbook of Physical Vapor Deposition PVD Processing

Written By D. M. Mattox
Handbook of Physical Vapor Deposition  PVD  Processing
  • Publsiher : Cambridge University Press
  • Release : 19 September 2014
  • ISBN : 0080946585
  • Pages : 944 pages
  • Rating : 5/5 from 1 reviews
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Read or download book entitled Handbook of Physical Vapor Deposition PVD Processing written by D. M. Mattox which was release on 19 September 2014, this book published by Cambridge University Press. Available in PDF, EPUB and Kindle Format. Book excerpt: This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications. The book covers subjects seldom treated in the literature: substrate characterization, adhesion, cleaning and the processing. The book also covers the widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes. However, the author uniquely relates these topics to the practical issues that arise in PVD processing, such as contamination control and film growth effects, which are also rarely discussed in the literature. In bringing these subjects together in one book, the reader can understand the interrelationship between various aspects of the film deposition processing and the resulting film properties. The author draws upon his long experience with developing PVD processes and troubleshooting the processes in the manufacturing environment, to provide useful hints for not only avoiding problems, but also for solving problems when they arise. He uses actual experiences, called ""war stories"", to emphasize certain points. Special formatting of the text allows a reader who is already knowledgeable in the subject to scan through a section and find discussions that are of particular interest. The author has tried to make the subject index as useful as possible so that the reader can rapidly go to sections of particular interest. Extensive references allow the reader to pursue subjects in greater detail if desired. The book is intended to be both an introduction for those who are new to the field and a valuable resource to those already in the field. The discussion of transferring technology between R&D and manufacturing provided in Appendix 1, will be of special interest to the manager or engineer responsible for moving a PVD product and process from R&D into production. Appendix 2 has an extensive listing of periodical publications and professional societies that relate to PVD processing. The extensive Glossary of Terms and Acronyms provided in Appendix 3 will be of particular use to students and to those not fully conversant with the terminology of PVD processing or with the English language.

Handbook of Physical Vapor Deposition PVD Processing

Handbook of Physical Vapor Deposition  PVD  Processing
  • Author : D. M. Mattox
  • Publisher : Cambridge University Press
  • Release Date : 2014-09-19
  • Total pages : 944
  • ISBN : 0080946585
GET BOOK

Summary : This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films ...

Handbook of Physical Vapor Deposition PVD Processing

Handbook of Physical Vapor Deposition  PVD  Processing
  • Author : D. M. Mattox
  • Publisher : Unknown
  • Release Date : 1998
  • Total pages : 945
  • ISBN : 0080946585
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Summary : This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films ...

Handbook of Physical Vapor Deposition PVD Processing

Handbook of Physical Vapor Deposition  PVD  Processing
  • Author : Donald M. Mattox
  • Publisher : William Andrew
  • Release Date : 1998-12-31
  • Total pages : 944
  • ISBN : 0080946585
GET BOOK

Summary : This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films ...

The Foundations of Vacuum Coating Technology

The Foundations of Vacuum Coating Technology
  • Author : Donald M. Mattox
  • Publisher : William Andrew
  • Release Date : 2018-08-21
  • Total pages : 378
  • ISBN : 0080946585
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Summary : The Foundations of Vacuum Coating Technology, Second Edition, is a revised and expanded version of the first edition, which was published in 2003. The book reviews the histories of the various vacuum coating technologies and expands on the history of the enabling technologies of vacuum technology, plasma technology, power supplies, and ...

The Foundations of Vacuum Coating Technology

The Foundations of Vacuum Coating Technology
  • Author : Donald M. Mattox
  • Publisher : Springer Science & Business Media
  • Release Date : 2003
  • Total pages : 150
  • ISBN : 0080946585
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Summary : The Foundations of Vacuum Coating Technology is a concise review of the developments that have led to the wide variety of applications of this technology. This book is a must for materials scientists and engineers working with vacuum coating in the invention of new technologies or applications in all industries. ...

Handbook of Thin Film Deposition

Handbook of Thin Film Deposition
  • Author : Krishna Seshan
  • Publisher : William Andrew
  • Release Date : 2012-12-06
  • Total pages : 408
  • ISBN : 0080946585
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Summary : The Handbook of Thin Film Deposition is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, new materials for memory applications and methods for thin film optical ...

Handbook for III V High Electron Mobility Transistor Technologies

Handbook for III V High Electron Mobility Transistor Technologies
  • Author : D. Nirmal,J. Ajayan
  • Publisher : CRC Press
  • Release Date : 2019-05-14
  • Total pages : 430
  • ISBN : 0080946585
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Summary : This book focusses on III-V high electron mobility transistors (HEMTs) including basic physics, material used, fabrications details, modeling, simulation, and other important aspects. It initiates by describing principle of operation, material systems and material technologies followed by description of the structure, I-V characteristics, modeling of DC and RF parameters of ...

Surface Treatments for Biological Chemical and Physical Applications

Surface Treatments for Biological  Chemical and Physical Applications
  • Author : Mehmet Gürsoy,Mustafa Karaman
  • Publisher : John Wiley & Sons
  • Release Date : 2017-04-10
  • Total pages : 312
  • ISBN : 0080946585
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Summary : A step-by-step guide to the topic with a mix of theory and practice in the fields of biology, chemistry and physics. Straightforward and well-structured, the first chapter introduces fundamental aspects of surface treatments, after which examples from nature are given. Subsequent chapters discuss various methods to surface modification, including chemical ...

The Foundations of Vacuum Coating Technology

The Foundations of Vacuum Coating Technology
  • Author : Donald M. Mattox
  • Publisher : William Andrew
  • Release Date : 2018-06
  • Total pages : 256
  • ISBN : 0080946585
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Summary : The Foundations of Vacuum Coating Technology, Second Edition, is a revised and expanded version of the first edition, which was published in 2003. The book reviews the histories of the various vacuum coating technologies and expands on the history of the enabling technologies of vacuum technology, plasma technology, power supplies, and ...

Polymers Opportunities and Risks I

Polymers   Opportunities and Risks I
  • Author : Peter Eyerer
  • Publisher : Springer Science & Business Media
  • Release Date : 2010-07-31
  • Total pages : 432
  • ISBN : 0080946585
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Summary : Since their first industrial use polymers have gained a tremendous success. The two volumes of "Polymers - Opportunities and Risks" elaborate on both their potentials and on the impact on the environment arising from their production and applications. Volume 11 "Polymers - Opportunities and Risks I: General and Environmental Aspects" is ...

Medical Coatings and Deposition Technologies

Medical Coatings and Deposition Technologies
  • Author : David Glocker,Shrirang Ranade
  • Publisher : John Wiley & Sons
  • Release Date : 2016-07-11
  • Total pages : 800
  • ISBN : 0080946585
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Summary : Medical Coatings and Deposition Technologies is an important new addition to the libraries of medical device designers and manufacturers. Coatings enable the properties of the surface of a device to be controlled independently from the underlying bulk properties; they are often critical to the performance of the device and their ...

Advances in Coatings Deposition and Characterization

Advances in Coatings Deposition and Characterization
  • Author : MDPI
  • Publisher : MDPI
  • Release Date : 2020-12-29
  • Total pages : 196
  • ISBN : 0080946585
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Summary : Coatings offer the unique opportunity to create architectures that combine the functionality of two or more materials, conferring unique properties to objects with an extremely large palette of solutions. For this flexibility, thick and thin films have terrific impacts on the most relevant societal challenges. Computers, food packaging, airplanes, and ...

Non woven Fabrics

Non woven Fabrics
  • Author : Han-Yong Jeon
  • Publisher : BoD – Books on Demand
  • Release Date : 2016-03-24
  • Total pages : 326
  • ISBN : 0080946585
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Summary : Non-woven Fabrics is differentiated text which covers overall stream from raw fibers to final products and includes features of manufacturing and finish process with specialized application end use. Application range of non-woven fabrics is extended to all the industrial fields needless to say apparel, such as ICT (information and communication ...

Surface Modification of Magnesium and its Alloys for Biomedical Applications

Surface Modification of Magnesium and its Alloys for Biomedical Applications
  • Author : T.S.N. Sankara Narayanan,Il-Song Park,Min-Ho Lee
  • Publisher : Elsevier
  • Release Date : 2015-01-08
  • Total pages : 380
  • ISBN : 0080946585
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Summary : Surface modification of magnesium and its alloys for biomedical applications: Biological interactions, mechanical properties and testing, the first of two volumes, is an essential guide on the use of magnesium as a degradable implant material. Due to their excellent biocompatibility and biodegradability, magnesium based degradable implants provide a viable option ...

Labs on Chip

Labs on Chip
  • Author : Eugenio Iannone
  • Publisher : CRC Press
  • Release Date : 2018-09-03
  • Total pages : 1178
  • ISBN : 0080946585
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Summary : Labs on Chip: Principles, Design and Technology provides a complete reference for the complex field of labs on chip in biotechnology. Merging three main areas— fluid dynamics, monolithic micro- and nanotechnology, and out-of-equilibrium biochemistry—this text integrates coverage of technology issues with strong theoretical explanations of design techniques. Analyzing each ...