Handbook of Physical Vapor Deposition PVD Processing

Written By D. M. Mattox
Handbook of Physical Vapor Deposition  PVD  Processing
  • Publsiher : Cambridge University Press
  • Release : 19 September 2014
  • ISBN : 9780080946580
  • Pages : 944 pages
  • Rating : 5/5 from 1 reviews
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Read or download book entitled Handbook of Physical Vapor Deposition PVD Processing written by D. M. Mattox which was release on 19 September 2014, this book published by Cambridge University Press. Available in PDF, EPUB and Kindle Format. Book excerpt: This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications. The book covers subjects seldom treated in the literature: substrate characterization, adhesion, cleaning and the processing. The book also covers the widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes. However, the author uniquely relates these topics to the practical issues that arise in PVD processing, such as contamination control and film growth effects, which are also rarely discussed in the literature. In bringing these subjects together in one book, the reader can understand the interrelationship between various aspects of the film deposition processing and the resulting film properties. The author draws upon his long experience with developing PVD processes and troubleshooting the processes in the manufacturing environment, to provide useful hints for not only avoiding problems, but also for solving problems when they arise. He uses actual experiences, called ""war stories"", to emphasize certain points. Special formatting of the text allows a reader who is already knowledgeable in the subject to scan through a section and find discussions that are of particular interest. The author has tried to make the subject index as useful as possible so that the reader can rapidly go to sections of particular interest. Extensive references allow the reader to pursue subjects in greater detail if desired. The book is intended to be both an introduction for those who are new to the field and a valuable resource to those already in the field. The discussion of transferring technology between R&D and manufacturing provided in Appendix 1, will be of special interest to the manager or engineer responsible for moving a PVD product and process from R&D into production. Appendix 2 has an extensive listing of periodical publications and professional societies that relate to PVD processing. The extensive Glossary of Terms and Acronyms provided in Appendix 3 will be of particular use to students and to those not fully conversant with the terminology of PVD processing or with the English language.

Handbook of Physical Vapor Deposition PVD Processing

Handbook of Physical Vapor Deposition  PVD  Processing
  • Author : D. M. Mattox
  • Publisher : Cambridge University Press
  • Release Date : 2014-09-19
  • Total pages : 944
  • ISBN : 9780080946580
GET BOOK

Summary : This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films ...

Handbook of Physical Vapor Deposition PVD Processing

Handbook of Physical Vapor Deposition  PVD  Processing
  • Author : D. M. Mattox
  • Publisher : Unknown
  • Release Date : 1998
  • Total pages : 945
  • ISBN : 9780080946580
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Summary : This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films ...

The Foundations of Vacuum Coating Technology

The Foundations of Vacuum Coating Technology
  • Author : Donald M. Mattox
  • Publisher : William Andrew
  • Release Date : 2018-08-21
  • Total pages : 378
  • ISBN : 9780080946580
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Summary : The Foundations of Vacuum Coating Technology, Second Edition, is a revised and expanded version of the first edition, which was published in 2003. The book reviews the histories of the various vacuum coating technologies and expands on the history of the enabling technologies of vacuum technology, plasma technology, power supplies, and ...

The Foundations of Vacuum Coating Technology

The Foundations of Vacuum Coating Technology
  • Author : D. M. Mattox,Donald M. Mattox
  • Publisher : Elsevier
  • Release Date : 2003-04-16
  • Total pages : 150
  • ISBN : 9780080946580
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Summary : The Foundations of Vacuum Coating Technology is a concise review of the developments that have led to the wide variety of applications of this technology. This book is a must have for materials scientists and engineers working with vacuum coating in the invention of new technologies or applications in all ...

Handbook of Physical Vapor Deposition PVD Processing

Handbook of Physical Vapor Deposition  PVD  Processing
  • Author : Donald M. Mattox
  • Publisher : William Andrew
  • Release Date : 1998-12-31
  • Total pages : 944
  • ISBN : 9780080946580
GET BOOK

Summary : This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films ...

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  • Publisher : William Andrew
  • Release Date : 2012
  • Total pages : 392
  • ISBN : 9780080946580
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Summary : Resumen: The 2nd edition contains new chapters on contamination and contamination control that describe the basics and the issues. Another new chapter on meteorology explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of sub-micron dimensions. The book also covers PVD, laser and e-beam assisted deposition, ...

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  • Publisher : ASM International
  • Release Date : 2001
  • Total pages : 212
  • ISBN : 9780080946580
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Summary : Download or read online Surface Engineering for Corrosion and Wear Resistance written by J. R. Davis, published by ASM International which was released on 2001. Get Surface Engineering for Corrosion and Wear Resistance Books now! Available in PDF, ePub and Kindle....

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  • Publisher : Trans Tech Publications Ltd
  • Release Date : 2012-03-15
  • Total pages : 1920
  • ISBN : 9780080946580
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Summary : These are the proceedings of the 2nd International Conference on Key Engineering Materials (ICKEM 2012), held on 26-28th February 2012 in Singapore. The objective was to provide a forum for the discussion of new developments, recent progress and innovations in the field of key engineering materials. All aspects of design methodology ...

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  • Author : Anonim
  • Publisher : Unknown
  • Release Date : 2000
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  • ISBN : 9780080946580
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Summary : Download or read online Plating and Surface Finishing written by , published by which was released on 2000. Get Plating and Surface Finishing Books now! Available in PDF, ePub and Kindle....

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  • Publisher : CRC Press
  • Release Date : 2009
  • Total pages : 1593
  • ISBN : 9780080946580
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Summary : PerspectivesIntroductionNanoscience and Nanotechnology-The DistinctionHistorical PerspectivesAdvanced MaterialsTools of NanoNature's Take on Nano and the Advent of Molecular BiologyThe Nano PerspectiveSocietal Implications of NanoIntroduction to Societal IssuesEthical ImplicationsLegal ImplicationsEnvironmental ImplicationsPublic PerceptionFuture of Nanotechnology NanotoolsCharacterization MethodsCharacterization of NanomaterialsElectron Probe MethodsScanning Probe Microscopy MethodsSpectroscopic MethodsNonradiative and Nonelectron Characterization MethodsFabrication MethodsFabrication of Nano....

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  • Author : Heinrich Dubbel
  • Publisher : Copernicus
  • Release Date : 1994
  • Total pages : 921
  • ISBN : 9780080946580
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Summary : Dubel's Handbook has provided generations of German-speaking engineers with a comprehensive source of guidance and reference on which they can rely throughout their professional lives. DLC: Mechanical engineering....

Semiconductor Manufacturing Handbook

Semiconductor Manufacturing Handbook
  • Author : Hwaiyu Geng
  • Publisher : McGraw Hill Professional
  • Release Date : 2005-05-18
  • Total pages : 800
  • ISBN : 9780080946580
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Summary : This handbook will provide engineers with the principles, applications, and solutions needed to design and manage semiconductor manufacturing operations. Consolidating the many complex fields of semiconductor fundamentals and manufacturing into one volume by deploying a team of world class specialists, it allows the quick look up of specific manufacturing reference ...

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  • Publisher : Blackie Academic and Professional
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  • ISBN : 9780080946580
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Summary : A concise review of the most up to date coatings and surface treatments, their applications, principles of operation, strengths and weaknesses....

Fabrication and Site Specific Growth of Nanowires

Fabrication and Site Specific Growth of Nanowires
  • Author : Chun-I. Wu
  • Publisher : Unknown
  • Release Date : 2006
  • Total pages : 458
  • ISBN : 9780080946580
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Summary : Download or read online Fabrication and Site Specific Growth of Nanowires written by Chun-I. Wu, published by which was released on 2006. Get Fabrication and Site Specific Growth of Nanowires Books now! Available in PDF, ePub and Kindle....

Handbook of Modern Coating Technologies

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  • Author : Mahmood Aliofkhazraei,Ali Nasar,Mircea Chipara,Nadhira Bensaada Laidani,Jeff Th.M. De Hosson
  • Publisher : Elsevier
  • Release Date : 2021-03-06
  • Total pages : 554
  • ISBN : 9780080946580
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Summary : Handbook of Modern Coating Technologies: Fabrication Methods and Functional Properties reviews different fabrication methods and functional properties of modern coating technologies. The topics in this volume consist of nanocoatings by sol–gel processes for functionalization of polymer surfaces and textiles and mechanical fabrication methods of nanostructured surfaces such surface mechanical ...